材料科学与工程杂志

Observation of Optical Properties of Gold Thin Films Using Spectroscopic Ellipsometry

Abstract

Pradhan SK

In this research work, an attempt has been made to synthesize nano-structured gold thin films over Silicon dioxide (SiO2) coated on Silicon(Si) Substrate using three deposition techniques namely DC Sputtering, Pulsed DC Sputtering, and Pulsed Laser Deposition(PLD). Optical measurements using spectroscopic ellipsometry showed that the dielectric constants of the films differed between films synthesized by different synthesis routes. This was expected because different synthesis routes yielded different microstructure. The difference in microstructures results in differences in electronic structure and therefore resulting in the differences on the optical response.